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- p- , Si02 Si3N4.
U10 = - 1015.
U ≥ 15...20 . Si2-Si3N4. , Si2-Si. U0 = - 1...2, -. 0. UA≈ 0 - - . ! D0 = "0"
- , U0 . , .. - U0A-U≈-5B ˃ U10. , ". D0 = 1".
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U = -15...20. Si2-Si3N4 , - U1q. "1". 1. , 0", - .
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- "" . - . 101.
.101. () ()
U = 15..,20, - . - , Si-SiO2, "" . , -. ( ), ( ) .
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.102. .
.103.
.103. .
, . 103, , .. N = N1, N - ( ). . . DI0 (. 103 6). DI, - D0. . = 1 D0 , = 0 . .103 , . WR/RD . , , (). PR (.103 ). UPR, . . , 4, 8 16- .
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1. .., .. . - ., , 1981 .
2. .. . - ., , 1985 .
3. .., .. . - ., , 1986 .
4. .., .. . - ., , 1989 .
5. .. . - ., , 1989 .
6. .., . . - ., , 1990 .
7. .., .., .. . - .. , 1991 .
8. .., ., . . - ., , 1988 .
9. .., .. . - .. , 1988 .
10. .., .., .. . - ., , 1991 .