1. 4
2. - 5
2.1. 9
2.2. 12
3. - 13
3.1 - MIMOSA 14
3.2 -
DEPFET 17
4. - ,
- 19
5. -
22
6. 24
7. 28
8. 29
, , -. ( , ) , , . , , , - .
CMOS APS (CMOS ‑ Complementary Metal Oxyde Semiconductor, APS ‑ Active Pixel Sensor), , -- () [1-3]. ‑ , , p- n- .
- - ( (photogate)), - () . , , . 60- , 1993 , NASA (Jet Propulsion Laboratory) - .
, - , , - , , , , , , [4]. , , .
-
, - . .1. - .
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.3. - ()
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.4. ( ).
15
, , . MOSFET . MOSFET (Metal Oxide Semiconductor Field Effect Transistor) ‑ , - . , . MOSFET, , .
MOSFETs () () (). , . , POSFET- (P-polycristalic) CPOS
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.5.
(Complementary Polycristalic Oxyde Semiconductor).
, , . (readout amplifier transistor), . , . . , , , .