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: CoolMOS Silavaco TCAD
-151
: Silvaco TCAD, CoolMOS , . 24 , 9 , 4 .
24
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2
3
5
1 Silvaco TCAD 6
2 MOSFET- 7
3 CoolMOS- 12
4 CoolMOS- 16
5 CoolMOS Silavaco TCAD 18
5.1 18
5.2 CoolMOS 21
23
24
- . , TCAD (Technology Computer Aided Design), TMA Inc. (), ISE Integrated Systems Engineering AG (), Synopsys Inc. () Silvaco International (). .
Silvaco TCAD. CoolMOS , .
1 Silvaco TCAD
() Silvaco TCAD (. Technology Computer Aided Design) , , .
. . , , , .
TCAD :
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- Victory Process 3D Process Simulator, : -, ;
- Victory Cell 3D Process Simulator, , CMOS-, TFT, ;
- Athena . ATHENA , , , , ;
- Atlas , ;
- Virtual Wafer Fab TCAD , .
2 MOSFET-
MOSFET-
3 MOSFET-. n+ - () n-, p-well, n- n+, .
1 MOSFET-
( ) p-n . ( ) p-n n+, ( ). , n+ , p-n . n+ , p-well, . .
- , , , n- . . Au Pt. - 0,71,2 MOSFET-. , , . . , , Qrr [1].
, (t1t4) 2 : . t . - , . 2 , . , n+ , p-n , p-well. 2.
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2 - MOSFET-, (t1t4: , )
3 - . , 2 n+, , p-well - p-n- . - ( 1 2 ) p-n- . . - . - [2]. p-well. - p-well .
4 . , . 2 - n+. dv/dt, ( ) , n- n+. - , , p-well. p-well, 2.
MOSFET-. . 5 MOSFET-, MOSFET-. p-well n+, p- , n+- . p-well , 3.
3 - MOSFET-, n+
, n, p-well - , p-well ( ). . p-n-, p-well n+, n-p-n-. , , , , . ( dv/dt ) , p-well, , p-well . . MOSFET- . - MOSFET- .
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3 CoolMOS-
CoolMOS- . 4 . , 2: p- . p- <n-, CoolMOS- . p- , .
4 - CoolMOS-
CoolMOS-. 4 5.
5 - CoolMOS (t1t4: , )
t1 , . , , p- n- . - t2 p-well , p- .
t3 , n+, , p-well. , - , . , , p-n- [3].
CoolMOS- p-n- , , . . , - . p- n- , . p-well.
4 . CoolMOS- , . , , t1, . , . , , p-n-.
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n- n+-, , . . , , , . . CoolMOS . , ; . , CoolMOS . dv/dt .
P-, p-well , : 6, p-well, , . , p- n- , . p- . n+- , , , n-p-n-. , CoolMOS .
6 - CoolMOS- , ,
, CoolMOS di/dt . 7 , 1000 A/. 3000 A/ [4].
7 - CoolMOS- di/dt > 900 / 380
4 CoolMOS-
:
1) ;
2) CoolMOS Uds=600 5 , Uds=1000 - 10 , MOS-;
3) 3 , 20%, 2,5 /2;
4) 220 247;
5) ( 50%);
6) 200 ;
7) 40 114 ;
8) : 3,5 - 5,5 .
:
1) , , : , , - .;
2) (UPS) ;
3) ;
4) ;
5) 1 1 ;
6) .
5 CoolMOS Silavaco TCAD
5.1
CoolMOS DeckBuild, TCAD Silavaco .
# CoolMOS Athena
go athena
# x
line x loc=0.00 spac=0.25
line x loc=3.00 spac=0.10
line x loc=10.00 spac=1.0
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# y
line y loc=39.00 spac=0.5
line y loc=40.00 spac=0.5
#
init c.phosphor=1.0e18 orientation=100 space.mult=2
# , 1×1015 -3, 39 , 10 , 1200
epitaxy time=10 temp=1200 thickness=39 divisions=79 dy=0.10 ydy=0.00 c.phos=1.0e15
#
deposit oxide thickness=0.06 div=1
deposit poly thickness=0.35 div=3
deposit oxide thickness=0.35 div=3
deposit photores thickness=1 div=3
#
etch photores p1.x=3 left
etch oxide p1.x=3 left
etch poly p1.x=3 left
etch oxide p1.x=3 left
#
implant boron dose=1e14 energy=80
#
etch photores all
# , 100 , 1100 0
diffuse time=100 temp=1100
#
implant arsenic dose=3e15 energy=100
# , 20 , 1100 0
diffuse time=20 temp=1100
#
deposit oxide thickness=0.5 div=4
etch oxide thickness=0.5
etch start x=0 y=-0.1
etch cont x=0 y=0.8
etch cont x=2.5 y=0.8
etch done x=2.5 y=-0.1
, 1 , 1100 0
diffuse time=1 temp=1100
#
deposit alum thickness=1 div=8
etch alum right p1.x=3.5
#
electrode name=source x=0
electrode name=gate x=5 y=-0.2
electrode name=drain backside
# Atlas
go atlas
# p-
doping p.type conc=2.0e15 x.min=0.0 x.max=4.0 y.min=1.5 y.max=39.0 uniform
# powerex14_0.str
save outfile=powerex14_0.str
#
tonyplot powerex14_0.str -set powerex14_0.set
#
models cvt srh print
impact selb
# , n.poly n+ workfuction=4.17eV
contact name=gate n.poly
# ( )
method newton trap maxtraps=10 climit=1e-4 ir.tol=1e-30 ix.tol=1e-30
#
solve init
# log
log outf=powerex14.log
#
solve vdrain=0.03
solve vdrain=0.1
# 0,25 , 0,25 2
solve vdrain=0.25 vstep=0.25 vfinal=2 name=drain
# 0,25 , 1 10
solve vstep=1 vfinal=10 name=drain
# 0,25 , 5 660
solve vstep=5.0 vfinal=660 name=drain
# 0,25 , 0,25 700
solve vstep=0.25 vfinal=700 name=drain compl=1.e-7 cname=drain outf=powerex14_1.str master onefile
#
extract name="bv" max(v."drain")
tonyplot powerex14_1.str -set powerex14_1.set
tonyplot powerex14.log -set powerex14_2.set
quit
5.2 CoolMOS
DeckBuil Run. CoolMOS .
CoolMOS 670 .
8 CoolMOS
9 CoolMOS
CoolMOS , .
MOSFET , , , , , CoolMOS .
Silvaco TCAD CoolMOS .
1 .. / .. , .. . : , 2006. 188 .
2 .. : . / . . . , 2005. 492
3 Lorenz L. CoolMOS a new milestone in high voltage Power MOS / L.Lorenz, G. Deboy. - Proc. ISPSD 99. Toronto, 1999. 124 p.
4 . . . / .. // . 2009. 100.
. 157 162.