. , , , . . Bell Laboratories, IBM, RSRE, Texas Instruments, Wacker 1960- , , , .
/ . , . , , , . , , . , , , .
, .. 1960- 2002 . . , . . .. ; , , ; .
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, , , . k*, k0:
k0=CS/CL,
CS CL , . k0 < 1, , Si, Ge GaAs, , . : (1) (2) .
Tiller [1] , CS , CL, :
CS = CL[1 (1 k0) exp(-k0Rx/DL)],
x , R , DL . DL / R , DL/R k0 DL / R, .
, , [2]. :
CS = k0 CL(1 fS)(k0 1),
fS . [2]. , . , .
( ) Burton, Prim Slichter (BPS) [3]. d, , - . keff :
keff = CS / CL = k* /[k*+(1k*)exp(R d/ DL)],
k* . , k* k0.
, R d , CS , .. . R d , . , - , d , - . , R, d , .
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, , , . , . , . , , [4].
. 1 GaSb, ( [5]).
, . 1, , [5]. Hurle [6] , . , , . , , , . , - , - / [5-7]. , , , ( ) . , .