4 , :
- ;
- ( / );
- ( );
- (, ).
:
, .. , . 9 1 4 1.
, .. , . 6 1.
,
3 % vol (. 1). , , .
( ) . ( ).
, , ,
- , , , 611 [1.16].
- 60694, . -5 C,
400 [1.16], PH20 = 611 .
- , 100...300 [1.15]. - - , , . , .. , . (. 4, ) 4).
, , 150 , -15 C [1.16]. 2.7 (400 ) 4 , . (611 ).
. 1 ppmv, p.
. 1: [ppmv] p. : (611 , Td = 0 C). : 60694 (400 , Td = -5 C). : (150 , Td = - 15 C). : (< 200 ) (< 750 kPa) .
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ppmv pH20 p, p. ppmv , 60694 . . ( ).
ppmv . , , , :
- 750 , . .
- 200 . , , , .
, , 150 , , , 200 750 .
. , , . , 1 , , 1 m .
. , , . , . , 1 /3. . 1.
1: , ; , , , .
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. - - | - - - - - | ||||
: CF4 | - | - - | 3%vol | 3%vol total | <1%vol |
- : SF4, WF6 SOF4, SO2F2 SOF2, S02, HF | - | 100ppmv 2000ppmv | 50 ppmvtotal1) | ~ 10 ppmvtotal | |
pH20< 400 2) | pH20 < 150 (Td<-15C) 750 ppmv p < 750 kPa 3) 200ppmv p < 750 kPa 3) | < 10 4) | |||
, , - - | 10mg/m3 5) | < 1 mg/m3 | |||
/ | -, , | - - - , - | < 1 m |
1) , , 12 ppmv SO2 + SOF2, . 2, 2
2) 60694 Td = -5C.
3) p < 750 kPa, , ( , ), p < 200 kPa , ( ).
4) Td = -45 C
5) 0.3 ppmw SF6 500