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Materials used in Semiconductor Manufacturing




 

Silicon, symbol Si, is the most commonly used basic building block of integrated circuits. Silicon is a semiconductor, which means that its electrical behavior is between that of a conductor and an insulator at room temperature. With the proper addition of dopant elements, p-n junctions can be formed on silicon. Useful electronic components and integrated circuits can be built from p-n junctions. Aside from being used as semiconductor substrate, silicon is also widely used as dielectric in integrated circuits, usually in the form of silicon dioxide. Dielectric layers are used to isolate conductive lines and the individual components in the circuit from each other. Polycrystalline silicon, or polysilicon, is also used for making resistors or conductors in integrated circuits.

Silicon is also widely used in semiconductor packaging, being the main ingredient of plastic encapsulants for integrated circuits. Silicon is also used in die overcoats. Silicon is obtained by heating silicon dioxide (SiO2), or silica, with a reducing agent in a furnace. Silicon dioxide is the main component of ordinary sand.

Aluminum, symbol Al, is a lightweight metal with silvery appearance. It is the most abundant metallic element on earth.

Aluminum is used in many aspects of semiconductor manufacturing. On the integrated circuit, Al metal lines are commonly used as the main conductor between components, mainly because of its low resistivity (2.7 mohm-cm). As a thin film, it also has good adherence to silicon dioxide. When used for 1 metallization, Al is usually very lightly doped with other elements such as Si and/or Cu to improve its characteristics and reliability.

In semiconductor assembly, ceramic packages are composed mainly of alumina. Aluminum is also used for wire bonding integrated circuits in ceramic packages.

Gold, symbol Au, is a soft metallic element that is bright yellowish in color. A good conductor of heat and electricity, it is also the most malleable and ductile of all metals.

Gold is used in many aspects of semiconductor manufacturing, particularly in the assembly or packaging processes. Its most widespread use is in wire bonding. Because of gold's excellent conductivity and ductility, it is extensively used in making wires for the connection of the integrated circuit to the leads of the package. Aside from manufacturability, the ductility of gold wires offers one more advantage when used in plastic-encapsulated devices, i.e., it makes the wires resistant to wire breaking during the encapsulation process.

 

KEYS

UNIT I

 

Text I

Exercise 4


1 True

2 False

3 True

4 False

5 True

6 False


 

Text II

Exercise 2 Exercise 3 Exercise 4 Exercise 9
1 G 1True 1 D 1 D
2 E 2False 2 E 2 F
3 D 3False 3 G 3 B
4 B 4False 4 B 4 H
5 A 5False 5 H 5 E
6 C 6False 6 I 6 I
    7 A 7 A
    8 F 8 J
    9 C 9 C
      10 G

 

LISTENING

Exercise 1

Quantity Letter SI Units (Sommerfeld) SI Units (Kennelly) CGS Units (Gaussian)
Field H A/m A/m Oersteds
Flux Density (Magnetic Induction) B Tesla Tesla Gauss
Flux Weber Weber maxwell
Magnetization M A/m - erg.Oe-1.cm-3

 

FINAL TEST

Exercise 2 Exercise 3
1 B 1False
2 A 2True
3 D 3False
4 A 4False
5 C 5False
  6True
  7False

UNIT II

Text I

Exercise 2 Exercise 3 Exercise 4 Exercise 8
1 C 1True 1 C 1 C
2 G 2True 2 H 2 D
3 F 3False 3 G 3 A
4 A 4False 4 F 4 B
5 I 5False 5 A  
6 B 6False 6 D  
7 D   7 E  
    8 B  

 

Text III

Exercise 3 Exercise 6. Problem 1 Exercise 6. Problem 2
1 A 1A=6.530circular mils 1A=375.000square mils
2 D 2A=5.1287square mils 2A=477.000circular mils
3 C    
4 B    
5 B    

 

Text IV

Exercise 1 Exercise 2 Exercise 3
1 F 1False R= 4.41W
2 D 2False  
3 C 3False  
4 B 4True  
5 E 5False  
6 A 6True  

Text V

Exercise 4. Problem 2

I= 0.434 A

 

Text VI

Exercise 3 Exercise 7 Exercise 9
1 A 1conductor 1False
2 F 2conductivity 2True
3 C 3insulator 3True
4 D 4superconductor 4False
5 E 5superconductivity 5False
6 B    
7 G    

LISTENING

Exercise 2 Exercise 3
1movable charges 1thermally
2potential difference 2offer
3Ohms law 3movable
4non-metallic conductors 4Ohms law
5electromagnetic field 5highnull resistance
6limit to the current 6generate
7non-conducting materials 7cross-sectional area
8electrical resistance  

FINAL TEST

Exercise 2 Exercise 3
1False 1 C
2False 2 B
3False 3 A
4True 4 C
5True 5 A
6False  

UNIT III

Text I

Exercise 3 Exercise 5
1conductivity 1 D
2exhibit 2 G
3suitable 3 H
4inhomogeneous 4 I
5rectifiers 5 F
6consumption 6 J
7application 7 A
8detectors 8 E
9variety 9 C
10characteristic 10 B
11consequently  

Text III

Exercise 2 Exercise 4
1 G 1 D
2 D 2 A
3 A 3 B
4 F 4 G
5 H 5 E
6 B 6 F
7 C 7 C

Text IV

Exercise 2


E

D

C

A

B


 

LISTENING

Exercise 3 Exercise 4
1False 1 B
2False 2 D
3True 3 E
4False 4 H
5True 5 G
6True 6 C
7False 7 A
  8 F

 

FINAL TEST

Exercise 1 Exercise 2
1False 1 B
2False 2 C
3False 3 A
4False 4 C
5True 5 C
6False 6 B
7True 7 B

 

 

REFERENCES

 

1 Cogbell J.R. Foundations of Electrical Engineering. London, 1996.

2 Eric H. Glendinning, Norman Glendinning. Electrical and Mechanical Engineering. OUP, 2001.

3 Godman A., Payne E. Longman Dictionary of Scientific Usage. Longman Group Ltd., 1989.

4 Noel M. Morris. Mastering Electrical Engineering. The Macmillan Press Ltd., London, 1991.

5 .., .. : ./ . .: - , 2004.

6 .. Electricity. - ./ . .: - , 2004.

7 www.wikipedia.com

8 www.tpub.com

9 www.hammerzone.com

10 www.logging.bham.ac.uk

11 www.bbc.co.uk

12 www.hyperphysics.phy-astr.gsu.edu

 

 

CONTENT

 

UNIT I. 3

Magnetism

UNIT II 26

Conductors

UNIT III.. 50

Semiconductors

ANNOTATION SECTION... 67

glossary 78

THE LIST OF CHEMICAL ELEMENTS.. 82

Tapescripts84

Keys86

references...90

 

 


 

 

 

 

 

 

 

 

 

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26.06.2006

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